In the manufacturing process, equipment efficiency and stability and process consistency are important factors to ensure high product quality and yield. DE-FDC establishes communication with equipment and MES, collects RawTrace data from sensors in the equipment, extracts valid characterization factors from them, monitors equipment operation throughout the production process, and provides early warning and real-time adjustment to ensure the stability of the production process. Meanwhile, DE-FDC collects a large amount of equipment data and Yield Analysis System (YMS), which can help find the root cause of yield problems quickly through big data machine learning, and feed back to production line for timely correction. In addition, the effective model established with inline measurement enables Fab to adjust the sampling strategy in time, reduce CycleTime and optimize the use of measurement equipment to reduce cost while ensuring monitoring sensitivity.