DATAEXP-SPC (DE-SPC for short) is a key tool for monitoring and improving semiconductor manufacturing processes. By collecting Inline, Defect, and WAT data and configuring various control charts and rules for the parameters, DE-SPC helps customers to monitor the anomalies and stability of the manufacturing process in real time. DE-SPC supports diversified data collection, batch model configuration, and multi-dimensional report analysis, and constructs an efficient and closed-loop quality management system.