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Process Development Tester
Utilized in the research and development stage to improve testing efficiency and accuracy
Introduction

The semiconductor industry is rapidly evolving. Research and development play a crucial role in the semiconductor industry, as improvements in semiconductor materials, processes, and device designs can enhance chip performance in terms of speed, power consumption, integration, and more, thereby driving the development of electronic products.

 

During the research and development stage, a vast number of parameters are tested to assess whether the devices and processes can meet the requirements. Semitronix provides efficient and precise testing equipment that is suitable for various scenarios, including SPICE model testing, addressable testing, reliability testing, etc., providing support for technological innovation in the semiconductor industry.

Advantages

High Test Efficiency
Enables parallel testing of single or multiple modules
High Testing Accuracy
Current measurement accuracy : 0.1pA with optional current measurement resolution of 0.1fA
Co-Optimized with Addressable Design
Improves testing efficiency and identifies device or process issues

Basic configuration

Tester T4000 (48/100 pin)*
Standard Resources HR_SMU+HS_SMU (18~36)
Pulse generator (2/4)
Signal analyzer (2)
Switch matrix
LCR Meter (1/2)
Number of measurement pins 48/100
Voltage Coverage ±200 V
Current Coverage ±1 A
Voltage measure sensitivity 100 nV
Current measure sensitivity  0.1fA
Voltage measure accuracy 100uV
Current measurement accuracy 0.1 pA
Maximum SMU sample rate 1.8M samples/sec
Capacitance measurement accuracy 10 fF
RO Frequency Coverage ~ 20MHZ
Measurement Functions DC Current / DC Voltage / Kelvin / Capacitance / Inductance
AC Current / AC Voltage / Differential Voltage / Frequency
Arbitrary Waveform / Clock Generation /
Synchronization (triggering mode) / C-V scan

Typical Supported Test Items
Addressable (Transistor Array/ Yield Array/Ring Oscillator
Array/CBCMOVCMDenseArrayHYDS)
ID/VT/VTGM/IOFF/ISUB/BV/CAP//ICP
BETA/VBE/BVCEO/BVCBO/BVEBO
R2/RKLV/LK/CAP_METAL
IREAD/ISTANDBY/IDDQ/WM/SNM
ERASE/PROGRAM
  IDDA/IDDQ/FREQ
  IDDA/IDDQ/FREQ
Mean time between failures (MTBF) > 1000 hours
Mean time to repair (MTTR) < 6 hours
Uptime rate ~ 97%

 

# Can select based on user needs
* Both T4000 and T4100S can support WLR test if upgrading software
This table shows recommend testers at different application, if you have other requirements, please contact us.

Software

User-Friendly
· Use TCL/C++ language for algorithm
· Support import and export of spec files in the excel or txt format
Speed-up Testing
· Support auto grouping of test items with the same initialization conditions to improve testing speed
Automation
· Auto-run integration w/ fab-wide EAP system
· Customizable data format (.lot, .csv, .ad5, etc.)
Other Powerful Functions
· Verification on PC with virtual hardware environment
· Debug mode makes Algo debug much easier and more efficient
· Direct import of baseline testplan
· Real time display
· Early alarm and low yield management
Automatically retest failed test items which may have probing issues
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