Contact Us
WLR Tester
Check whether the device can maintain high consistency in electrical specifications
Introduction

WLR (Wafer Level Reliability) testing is a specialized testing method used to assess the reliability of semiconductor devices at the wafer stage. This method directly tests chip reliability at the wafer level to ensure that the devices meet quality and lifetime requirements. WLR testing involves a series of rigorous stress tests such as Hot Carrier Injection (HCI), Bias Temperature Instability (BTI), Electromigration (EM), Time-Dependent Dielectric Breakdown (VTDDB), and Voltage Ramp Dielectric Breakdown (VRAMP). These tests simulate device operation under various extreme conditions, helping engineers identify and improve weak points in the process to enhance overall product reliability.

 

WLR testing finds widespread application in the manufacturing processes of various semiconductor devices, particularly in sectors with high performance and high reliability demands like automotive electronics, communication devices, consumer electronics, and industrial control. Through WLR testing, manufacturers can ensure the stability and durability of their products in real scenarios, meeting customer needs for high-quality electronic products.

Advantages

Powerful Performance
· Maximum applied voltage/current up to 200V/1A
· Maximum power up to 20W
· Current measurement accuracy :0.1pA
· Voltage measurement accuracy: 100uV
· Test data can match with mainstream benchmark machines in the market
Automation
· Control prober temperature without manual intervention
· Support automated high and low-temperature testing
Compatibility
· Supports integration with various probers (TEL/TSK/Sidea/Semishare…), implementing the EAP GEM 300 standard for automated testing
· Provides software upgrade for Semitronix’s WAT tester to support WLR testing

Basic configuration

WLR Tester T4000 (24/48/100 pin)
Standard Resources HR_SMU+HS_SMU (4~36)
Pulse generator (2/4)#
Signal analyzer (2)#
Switch matrix
LCR Meter (1/2)#
Number of measurement pins 24/48/100
Voltage Coverage ±200 V
Current Coverage ±1 A
Voltage measure sensitivity 100 nV
Current measure sensitivity 10 fA or 0.1fA#
Voltage measure accuracy 100uV
Current measurement accuracy sub-pA
Maximum SMU sample rate 1.8M samples/sec
Capacitance measurement accuracy 10 fF#
RO Frequency Coverage ~ 20MHZ#
Measurement Functions DC Current / DC Voltage / Kelvin / Capacitance / Inductance
AC Current / AC Voltage / Differential Voltage / Frequency
Arbitrary Waveform / Clock Generation #/
Synchronization (triggering mode)# / C-V scan#
Typical Supported Test Items VRAMP/JRAMP
VTDDB/JTDDB
HCI
BTI/BTI_OTF
FASTRES/KELRES/ISO_EMR/TCR/TVP/CONSTANT_I
Mean time between failures (MTBF) > 1000 hours
Mean time to repair (MTTR) < 6 hours
Uptime rate ~ 97%

 

# Can select based on user needs
* Both T4000 and T4100S can support WLR test if upgrading software
This table shows recommend testers at different application, if you have other requirements, please contact us.

Software

RE Testbuilder
· Fast and intelligent generation of RE testplan
· Improve testplan editing efficiency
Automatic Temperature Control
Temperature control is performed through Algo
Real-time Display
· Displays various curves during the testing process, including HCI Id degradation, VRAMP Ig Vs Stresstime…
· Users can view the data trend directly
Smart Parallel Testing
· Assign measurement resources automatically for multi-die or within die parallel testing
· Support synchronous and asynchronous smart parallel testing
XML 地图